Patrick K. Montgomery
Lithographer at NXP Semiconductors
SPIE Involvement:
Publications (20)

Proceedings Article | 14 May 2007 Paper
Proceedings Volume 6607, 66071C (2007)
KEYWORDS: SRAF, Optical proximity correction, Printing, Optical lithography, Silicon, Photomasks, Semiconducting wafers, Inspection, Optical simulations, Lithography

Proceedings Article | 3 May 2007 Paper
Frank Sundermann, Yorick Trouiller, Jean-Christophe Urbani, Christophe Couderc, Jérôme Belledent, Amandine Borjon, Franck Foussadier, Christian Gardin, Laurent LeCam, Yves Rody, Mazen Saied, Emek Yesilada, Catherine Martinelli, Bill Wilkinson, Florent Vautrin, Nicolo Morgana, Frederic Robert, Patrick Montgomery, Gurwan Kerrien, Jonathan Planchot, Vincent Farys, Jean-Luc Di Maria
Proceedings Volume 6533, 65330E (2007)
KEYWORDS: Optical proximity correction, Reticles, Metals, Photoresist processing, Semiconducting wafers, Critical dimension metrology, Metrology, Manufacturing, Cadmium, Semiconductors

Proceedings Article | 27 March 2007 Paper
M. Saied, F. Foussadier, J. Belledent, Y. Trouiller, I. Schanen, C. Gardin, J. C. Urbani, P. K. Montgomery, F. Sundermann, F. Robert, C. Couderc, F. Vautrin, G. Kerrien, J. Planchot, E. Yesilada, C. Martinelli, B. Wilkinson, A. Borjon, L. Le-Cam, J. L. Di-Maria, Y. Rody, N. Morgana, Vincent Farys
Proceedings Volume 6520, 65204Q (2007)
KEYWORDS: 3D modeling, Photomasks, Optical proximity correction, Polarization, Process modeling, Lithium, Optical lithography, Information technology, Semiconducting wafers, Semiconductors

Proceedings Article | 27 March 2007 Paper
Proceedings Volume 6520, 65201D (2007)
KEYWORDS: Optical lithography, Polarization, Transistors, Double patterning technology, Resolution enhancement technologies, Printing, System on a chip, Logic, Scanners, Optical proximity correction

Proceedings Article | 29 March 2006 Paper
Patrick Montgomery, Richard Peters, Cesar Garza, Terry Breeden, Marijean Azrak, Jack Jiang, Kiwoon Kim
Proceedings Volume 6153, 61532Y (2006)
KEYWORDS: Photoresist materials, Ions, Fluorine, Boron, Ion implantation, Semiconducting wafers, Silicon, Phosphorus, Chemical species, Semiconductors

Showing 5 of 20 publications
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