Dr. Pat G. Murray
Director Research and Development at Nanophase Technologies Corp
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | October 15, 2013
Proc. SPIE. 8884, Optifab 2013
KEYWORDS: Oxides, Nanotechnology, Polishing, Glasses, Particles, Crystals, Chemistry, Cerium, Surface finishing, Plasma

PROCEEDINGS ARTICLE | May 14, 2007
Proc. SPIE. 10316, Optifab 2007: Technical Digest
KEYWORDS: Polishing, Silica, Teeth, Glasses, Particles, Chemistry, Surface roughness, Atomic force microscopy, Abrasives, Surface finishing

PROCEEDINGS ARTICLE | May 2, 2005
Proc. SPIE. 10315, Optifab 2005: Technical Digest
KEYWORDS: Oxides, Polishing, Spatial frequencies, Particles, Manufacturing, Surface roughness, Extreme ultraviolet lithography, Cerium, Optics manufacturing, EUV optics

PROCEEDINGS ARTICLE | May 19, 2003
Proc. SPIE. 10314, Optifab 2003: Technical Digest

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