Dr. Patrick J. O'Keeffe
VP, Business Management at Cymer LLC
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 27 March 2007
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Lithography, Light sources, Optical amplifiers, Oscillators, Laser applications, Laser stabilization, Immersion lithography, Critical dimension metrology, Molybdenum, Pulsed laser operation

Proceedings Article | 28 May 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Light sources, Optical lithography, Oscillators, Calibration, Electrodes, Manufacturing, Laser stabilization, Molybdenum, Pulsed laser operation, Optics manufacturing

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Energy efficiency, Light sources, Optical amplifiers, Optical lithography, Oscillators, Control systems, Excimers, Molybdenum, Acoustics

Proceedings Article | 30 July 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Semiconductors, Lithography, Energy efficiency, Optical lithography, Argon ion lasers, Reliability, Laser applications, Control systems, Semiconducting wafers, Yield improvement

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