Patrick Sperling
at Fraunhofer-ILT
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 September 2019
Proc. SPIE. 11105, Novel Optical Systems, Methods, and Applications XXII
KEYWORDS: Oxides, Thin films, Graphene, Electrodes, Ultraviolet radiation, Laser applications, Resistance, Excimer lasers, Semiconducting wafers, Pulsed laser operation

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