Dr. Paul W. Ackmann
Fellow Engineer at
SPIE Involvement:
Senior status | Conference Program Committee | Conference Chair | Symposium Chair | Author | Editor
Publications (35)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Analytics, Lithography, Reticles, Metrology, Etching, Process control, Photomasks, Critical dimension metrology, OLE for process control

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Lithography, Reticles, Modulation, Metals, Image processing, Scanning electron microscopy, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Lithography, Reticles, Logic, Data modeling, Silicon, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Tolerancing

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Atrial fibrillation, Signal attenuation, Electrons, Distortion, Atomic force microscopy, Scanning electron microscopy, Photoresist materials, Photomasks, Panoramic photography, Semiconducting wafers

PROCEEDINGS ARTICLE | October 29, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Metrology, Calibration, Image processing, Scanning electron microscopy, Printing, Photomasks, Optical proximity correction, Feedback loops, Critical dimension metrology, Semiconducting wafers

SPIE Conference Volume | October 29, 2014

Showing 5 of 35 publications
Conference Committee Involvement (6)
Photomask Technology
11 September 2017 | Monterey, California, United States
Photomask Technology
12 September 2016 | San Jose, California, United States
Photomask Technology 2015
29 September 2015 | Monterey, California, United States
Photomask Technology 2014
16 September 2014 | Monterey, California, United States
SPIE Photomask Technology
16 September 2014 | Monterey, United States
Showing 5 of 6 published special sections
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