Dr. Paul C. Chow Profile

Dr. Paul C. Chow

Beamline Scientist at SRRC Taiwan

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Publications (1)

Proceedings Article | 21 November 2002 Paper

Use of deep reactive ion etching in the fabrication of high-efficiency high-resolution crystal x-ray analyzers

Bor-Yuan Shew, Ruey-Shing Huang, Duan-Jen Wang, Shen-Yaw Perng, Chien-Kuang Kuan, Yong Cai, Paul Chow, Markus Schwoerer-Boehning, Wolfgang Caliebe, Chi-Chang Kao, Chien Te Chen

Proceedings Volume 4783, (2002) https://doi.org/10.1117/12.453816

KEYWORDS: Deep reactive ion etching, Silicon, Crystals, Etching, Semiconducting wafers, Chemical analysis, X-rays, Scattering, Reactive ion etching, Statistical analysis

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