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Paul J. Duval
Senior Principal Engineer at RTX Corp
SPIE Involvement:
Author
Area of Expertise:
Photolithography
Websites:
Company Website
Publications (1)
Proceedings Article | 26 March 2013 Paper
Alignment strategy for mixed e-beam and optical lithography
Paul Duval, Kamal Tabatabaie-Alavi, Dale Shaw, Alan St. Germain
Proceedings Volume 8680, 868021 (2013) https://doi.org/10.1117/12.1000095
KEYWORDS: Optical alignment, Metals, Electron beam lithography, Silicon, Lithography, Gallium arsenide, Optical lithography, Semiconducting wafers, Silicon carbide, Gold
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