Paul S. Filitchkin
at Mentor Graphics Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Metrology, Data modeling, Visualization, Calibration, Error analysis, Scanning electron microscopy, Printing, Image filtering, Optical proximity correction, Statistical modeling

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