Dr. Paul T. Konkola
at Eyekon Systems LLC
SPIE Involvement:
Publications (6)

Proceedings Article | 29 January 2004
Proc. SPIE. 5168, Optics for EUV, X-Ray, and Gamma-Ray Astronomy
KEYWORDS: Semiconducting wafers, Silicon, Etching, Diffraction gratings, Assembly tolerances, Optical fabrication, Optical lithography, Metrology, Nanoimprint lithography, Roentgenium

Proceedings Article | 11 March 2003
Proc. SPIE. 4851, X-Ray and Gamma-Ray Telescopes and Instruments for Astronomy
KEYWORDS: Metrology, Assembly tolerances, Wavefront sensors, Surface finishing, X-rays, Silicon, Reflection, Polishing, Semiconducting wafers, Sensors

Proceedings Article | 13 November 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Interferometers, Metrology, Lithography, Optical alignment, Beam splitters, Mirrors, Heterodyning, Wavefront metrology, Interferometry, Signal processing

Proceedings Article | 30 January 2002
Proc. SPIE. 4485, Optical Spectroscopic Techniques, Remote Sensing, and Instrumentation for Atmospheric and Space Research IV
KEYWORDS: Interferometers, Lithography, Beam splitters, Diffraction gratings, Digital signal processing, Mirrors, Optics manufacturing, Signal processing, Optical lithography, Electron beam lithography

Proceedings Article | 30 January 2002
Proc. SPIE. 4496, X-Ray Optics for Astronomy: Telescopes, Multilayers, Spectrometers, and Missions
KEYWORDS: Glasses, Semiconducting wafers, Silicon, Particles, Epoxies, Coating, Reflection, Thin films, X-ray optics, Mirrors

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