Dr. Paul T. Konkola
at Eyekon Systems LLC
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | January 29, 2004
Proc. SPIE. 5168, Optics for EUV, X-Ray, and Gamma-Ray Astronomy
KEYWORDS: Metrology, Optical lithography, Roentgenium, Etching, Silicon, Optical fabrication, Nanoimprint lithography, Semiconducting wafers, Assembly tolerances, Diffraction gratings

PROCEEDINGS ARTICLE | March 11, 2003
Proc. SPIE. 4851, X-Ray and Gamma-Ray Telescopes and Instruments for Astronomy
KEYWORDS: Polishing, Metrology, Reflection, Sensors, X-rays, Silicon, Wavefront sensors, Semiconducting wafers, Assembly tolerances, Surface finishing

PROCEEDINGS ARTICLE | November 13, 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Lithography, Mirrors, Beam splitters, Metrology, Interferometers, Interferometry, Heterodyning, Signal processing, Optical alignment, Wavefront metrology

PROCEEDINGS ARTICLE | January 30, 2002
Proc. SPIE. 4485, Optical Spectroscopic Techniques, Remote Sensing, and Instrumentation for Atmospheric and Space Research IV
KEYWORDS: Lithography, Electron beam lithography, Mirrors, Beam splitters, Digital signal processing, Optical lithography, Interferometers, Signal processing, Optics manufacturing, Diffraction gratings

PROCEEDINGS ARTICLE | January 30, 2002
Proc. SPIE. 4496, X-Ray Optics for Astronomy: Telescopes, Multilayers, Spectrometers, and Missions
KEYWORDS: Thin films, Mirrors, X-ray optics, Reflection, Glasses, Particles, Silicon, Coating, Epoxies, Semiconducting wafers

PROCEEDINGS ARTICLE | November 28, 2000
Proc. SPIE. 4138, X-Ray Optics, Instruments, and Missions IV
KEYWORDS: Mirrors, X-ray optics, Metrology, Teeth, Silicon, Autocollimators, Optical alignment, Tolerancing, Optical mounts, Assembly tolerances

Showing 5 of 6 publications
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