Mr. Paul D. MacDonald
Director/Plasma & Mask Products at KLA-Tencor California
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 5, 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Metrology, Sensors, Quartz, Manufacturing, Chromium, Photomasks, Deposition processes, Semiconducting wafers, Temperature metrology

PROCEEDINGS ARTICLE | December 6, 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Electronics, Metrology, Sensors, Calibration, Photomasks, Critical dimension metrology, Optimization (mathematics), Thermal modeling, Temperature metrology

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