Paul F. Michaloski
Senior Optical Designer at Corning Tropel Corp
SPIE Involvement:
Conference Program Committee | Author
Publications (8)

Proceedings Article | 21 June 2019
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Deep ultraviolet, Silica, Polarization, Birefringence, Sensors, Crystals, Polarimetry, Objectives, Thin film coatings, Nanolithography

Proceedings Article | 21 September 2011
Proc. SPIE. 8170, Illumination Optics II
KEYWORDS: Microelectromechanical systems, Mirrors, Beam splitters, Speckle, Interferometers, Cameras, Wavefronts, Speckle pattern, Collimation, Diffusers

Proceedings Article | 9 September 2010
Proc. SPIE. 7652, International Optical Design Conference 2010
KEYWORDS: GRIN lenses, Refractive index, Mirrors, Solar concentrators, Sensors, Dielectrics, Reflectivity, Light sources and illumination, Light, Absorption

Proceedings Article | 29 September 2004
Proc. SPIE. 5525, Laser Beam Shaping V
KEYWORDS: Wafer-level optics, Lithography, Reticles, Axicons, Optical lithography, Lamps, Diffusers, Relays, Semiconducting wafers, Fiber optic illuminators

Proceedings Article | 14 September 2001
Proc. SPIE. 4346, Optical Microlithography XIV
KEYWORDS: Mirrors, Deep ultraviolet, Inspection, Reflectivity, Colorimetry, Objectives, Excimer lasers, Vacuum ultraviolet, Surface finishing, Combined lens-mirror systems

Showing 5 of 8 publications
Conference Committee Involvement (9)
Laser Beam Shaping XII
21 August 2011 | San Diego, California, United States
Laser Beam Shaping XI
2 August 2010 | San Diego, California, United States
Laser Beam Shaping X
3 August 2009 | San Diego, California, United States
Laser Beam Shaping IX
11 August 2008 | San Diego, California, United States
Laser Beam Shaping VIII
28 August 2007 | San Diego, California, United States
Showing 5 of 9 Conference Committees
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