Prof. Paul F. Nealey
Professor at Univ of Chicago
SPIE Involvement:
Author | Instructor
Publications (61)

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume PC12497, PC124970C (2023)
KEYWORDS: Directed self assembly, Chemistry, X-rays, Scattering, Reflectivity, Nanolithography, Manufacturing

Proceedings Article | 30 April 2023 Presentation
Ricardo Ruiz, Stacey Bent, Samuel Blau, Brett Helms, Frances Houle, Oleg Kostko, Patrick Naulleau, Paul Nealey, Christopher Ober, Dahyun Oh, Rachel Segalman, Cheng Wang
Proceedings Volume PC12497, PC124970J (2023)
KEYWORDS: Optical lithography, Stochastic processes, Photoresist materials, Molecular self-assembly, Materials processing, Extreme ultraviolet lithography, Extreme ultraviolet, X-ray characterization, Semiconductors, Semiconductor manufacturing

Proceedings Article | 13 June 2022 Presentation
Whitney Loo, Boyce Chang, Beihang Yu, Scott Dhuey, Ricardo Ruiz, Paul Nealey
Proceedings Volume PC12054, PC1205403 (2022)
KEYWORDS: Directed self assembly, Atomic layer deposition, Silicon, Quantitative analysis, Polymethylmethacrylate, Polymers, Photomicroscopy, Optical lithography, Nanostructures, Nanolithography

Proceedings Article | 13 June 2022 Presentation
Boyce Chang, Priscilla Pieters, Whitney Loo, Scott Dhuey, Eric Dailing, Yi Liu, Paul Nealey, A. Paul Alivisatos, Ricardo Ruiz
Proceedings Volume PC12054, PC120540F (2022)
KEYWORDS: Directed self assembly, Polymers, Nanocrystals, Superlattices, Polymer thin films, Photomasks, Nanofabrication, Molecules, Molecular self-assembly, Lithography

Proceedings Article | 12 April 2021 Presentation + Paper
Naoki Tambo, Kouhei Takahashi, Kunihiko Nakamura, Yasuyuki Naito, Elizabeth Michiko Ashley, Peter Duda, Paul Nealey, Masaki Fujikane
Proceedings Volume 11723, 1172306 (2021)

Showing 5 of 61 publications
Course Instructor
SC1067: Directed Self Assembly and its Application to Nanoscale Fabrication
This course explains basic principles and applications of directed self assembly (DSA), with particular emphasis on block copolymer directed self assembly. A primary goal of the course is to present in a systematic manner the central issues that govern directed self assembly, and to do so in a way that will enable current and future practicioners of directed self assembly to rapidly identify the potential and limitations of this technique for specific applications. Anyone who wants to answer questions such as, "what structures can I create, how robust are certain processes, or what materials should I employ" will benefit from taking this course.
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