Prof. Paul F. Nealey
Professor at Univ of Chicago
SPIE Involvement:
Author | Instructor
Publications (51)

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Lithography, Optical lithography, Etching, Silicon, Wet etching, Critical dimension metrology, System on a chip, HF etching, Tin

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Polymethylmethacrylate, Etching, Annealing, Silicon, Scanning electron microscopy, Optical inspection, Bridges, Directed self assembly, Wet etching, Defect inspection

SPIE Journal Paper | 6 September 2018
JM3 Vol. 17 Issue 03
KEYWORDS: Metals, Directed self assembly, Polymethylmethacrylate, Oxides, Copper, Dielectrics, Picosecond phenomena, Thermodynamics, Aluminum, Semiconducting wafers

SPIE Journal Paper | 22 August 2018
JM3 Vol. 17 Issue 03
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Picosecond phenomena, Tomography, System on a chip, Chemistry, Scanning transmission electron microscopy, Transmission electron microscopy, Semiconducting wafers, 3D image processing

Proceedings Article | 17 April 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Oxides, Polymethylmethacrylate, Polymers, Metals, Copper, Dielectrics, Directed self assembly, Picosecond phenomena, Semiconducting wafers, Thermodynamics

Proceedings Article | 19 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Optical lithography, Etching, Polymers, Annealing, Silicon, Photomasks, Directed self assembly, Nanofabrication

Showing 5 of 51 publications
Course Instructor
SC1067: Directed Self Assembly and its Application to Nanoscale Fabrication
This course explains basic principles and applications of directed self assembly (DSA), with particular emphasis on block copolymer directed self assembly. A primary goal of the course is to present in a systematic manner the central issues that govern directed self assembly, and to do so in a way that will enable current and future practicioners of directed self assembly to rapidly identify the potential and limitations of this technique for specific applications. Anyone who wants to answer questions such as, "what structures can I create, how robust are certain processes, or what materials should I employ" will benefit from taking this course.
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