Mr. Paul N. Patrone Profile

Paul N. Patrone

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Publications (2)

Proceedings Article | 26 March 2013

Block-copolymer healing of simple defects in a chemoepitaxial template

Paul Patrone, Gregg Gallatin

Proc. SPIE. 8680, Alternative Lithographic Technologies V

KEYWORDS: Lithography, Polymers, Interfaces, Physics, Monte Carlo methods, Directed self assembly, Line edge roughness, Systems modeling, Condensed matter, Standards development

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Proceedings Article | 21 March 2012

Modeling line-edge roughness in lamellar block copolymer systems

Paul Patrone, Gregg Gallatin

Proc. SPIE. 8323, Alternative Lithographic Technologies IV

KEYWORDS: Semiconductors, Lithography, Polymers, Interfaces, Manufacturing, Polymerization, Line edge roughness, Neodymium, Electroluminescent displays, Systems modeling

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