Paul N. Patrone
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 26, 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Polymers, Interfaces, Physics, Monte Carlo methods, Directed self assembly, Line edge roughness, Systems modeling, Condensed matter, Standards development

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Semiconductors, Lithography, Polymers, Interfaces, Manufacturing, Polymerization, Line edge roughness, Neodymium, Electroluminescent displays, Systems modeling

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