CONFERENCE PROCEEDINGS
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Paul N. Patrone
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Publications (2)
PROCEEDINGS ARTICLE | March 26, 2013
Block-copolymer healing of simple defects in a chemoepitaxial template
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Polymers, Interfaces, Physics, Monte Carlo methods, Directed self assembly, Line edge roughness, Systems modeling, Condensed matter, Standards development
PROCEEDINGS ARTICLE | March 21, 2012
Modeling line-edge roughness in lamellar block copolymer systems
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Semiconductors, Lithography, Polymers, Interfaces, Manufacturing, Polymerization, Line edge roughness, Neodymium, Electroluminescent displays, Systems modeling
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