Dr. Paul J. Resnick Profile

Dr. Paul J. Resnick

SMTS at Sandia National Labs

SPIE Involvement:

Editor | Author

Publications (5)

Proceedings Article | 14 February 2011 Paper

Microfabrication of microsystem-enabled photovoltaic (MEPV) cells

Gregory Nielson, Murat Okandan, Jose Cruz-Campa, Paul Resnick, Mark Wanlass, Peggy Clews, Tammy Pluym, Carlos Sanchez, Vipin Gupta

Proceedings Volume 7927, 79270P (2011) https://doi.org/10.1117/12.876422

KEYWORDS: Silicon, Solar cells, Gallium arsenide, Etching, Semiconducting wafers, Crystals, Metals, Photomasks, Computer aided design, Photovoltaics

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Proceedings Article | 16 January 2003 Paper

Vapor deposition of amino-functionalized self-assembled monolayers on MEMS

Matthew Hankins, Paul Resnick, Peggy Clews, Thomas Mayer, David Wheeler, Danelle Tanner, Richard Plass

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478206

KEYWORDS: Coating, Microelectromechanical systems, Silicon, Humidity, Nitrogen, Self-assembled monolayers, Liquids, Semiconducting wafers, Molecules, Oxides

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Proceedings Article | 16 January 2003 Paper

Diffusive transport in supercritical CO2 drying of MEMS structures

Paul Resnick, Matthew Hankins

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478208

KEYWORDS: Diffusion, Microelectromechanical systems, Liquids, Carbon monoxide, Carbon dioxide, Etching, Interfaces, Process modeling, Semiconducting wafers, Capillaries

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Proceedings Article | 2 October 2001 Paper

Surface preparation for selective tungsten deposition on MEMS structures

Paul Resnick, Seethambal Mani

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443010

KEYWORDS: Tungsten, Oxides, Etching, Liquids, Semiconducting wafers, Silicon, Microelectromechanical systems, Vapor etching, HF etching, Plasma

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Proceedings Article | 2 October 2001 Paper

Whole wafer critical point drying of MEMS devices

Paul Resnick, Peggy Clews

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443011

KEYWORDS: Carbon monoxide, Liquids, Semiconducting wafers, Microelectromechanical systems, Silicon, Interfaces, Capillaries, Particles, Data modeling, Contamination

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