Dr. Paul J. Resnick
SMTS at Sandia National Labs
SPIE Involvement:
Editor | Author
Publications (5)

Proceedings Article | 14 February 2011 Paper
Proc. SPIE. 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV
KEYWORDS: Photovoltaics, Etching, Metals, Solar cells, Crystals, Gallium arsenide, Silicon, Photomasks, Computer aided design, Semiconducting wafers

Proceedings Article | 16 January 2003 Paper
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Oxides, Molecules, Silicon, Nitrogen, Coating, Humidity, Semiconducting wafers, Self-assembled monolayers, Liquids

Proceedings Article | 16 January 2003 Paper
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Carbon dioxide, Etching, Capillaries, Interfaces, Diffusion, Semiconducting wafers, Carbon monoxide, Process modeling, Liquids

Proceedings Article | 2 October 2001 Paper
Proc. SPIE. 4558, Reliability, Testing, and Characterization of MEMS/MOEMS
KEYWORDS: Microelectromechanical systems, Contamination, Data modeling, Capillaries, Particles, Interfaces, Silicon, Semiconducting wafers, Carbon monoxide, Liquids

Proceedings Article | 2 October 2001 Paper
Proc. SPIE. 4558, Reliability, Testing, and Characterization of MEMS/MOEMS
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Tungsten, Silicon, Semiconducting wafers, HF etching, Plasma, Liquids, Vapor etching

Proceedings Volume Editor (7)

SPIE Conference Volume | 25 March 2014

SPIE Conference Volume | 26 March 2013

SPIE Conference Volume | 19 March 2012

SPIE Conference Volume | 10 February 2011

SPIE Conference Volume | 10 February 2010

Showing 5 of 7 publications
Conference Committee Involvement (7)
Micromachining and Microfabrication Process Technology XIX
5 February 2014 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVIII
5 February 2013 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVII
25 January 2012 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XVI
25 January 2011 | San Francisco, California, United States
Micromachining and Microfabrication Process Technology XV
26 January 2010 | San Francisco, California, United States
Showing 5 of 7 Conference Committees
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top