Paul Ryan
at Bruker UK Ltd.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper
Matthew Wormington, Adam Ginsburg, Israel Reichental, Alex Dikopoltsev, Alex Krokhmal, Yuri Vinshtein, Paul Ryan, Rahul Korlahalli, Franklin Wong, Silvio Rabello, Yang Song, Jie Li
Proceedings Volume 11611, 116110W (2021) https://doi.org/10.1117/12.2583966
KEYWORDS: X-rays, Semiconductors, Critical dimension metrology, Semiconducting wafers, Metrology, X-ray characterization, Scattering, Etching, Capacitors, 3D metrology

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top