Mr. Paul Sheridan
Applications Engineering Manager at FAZ Technology
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | May 14, 2015
Proc. SPIE. 9514, Laser Acceleration of Electrons, Protons, and Ions III; and Medical Applications of Laser-Generated Beams of Particles III
KEYWORDS: Lithography, X-rays, Ions, Plasmas, Extreme ultraviolet, Palladium, Picosecond phenomena, Molybdenum, Rhodium, Ruthenium

PROCEEDINGS ARTICLE | April 8, 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Spectrographs, Satellites, Ions, Extreme ultraviolet, Aluminum, Optical simulations, Pulsed laser operation, Plasma spectroscopy, Plasma, Tin

PROCEEDINGS ARTICLE | August 27, 2010
Proc. SPIE. 7802, Advances in X-Ray/EUV Optics and Components V
KEYWORDS: Zemax, Mirrors, Metals, X-rays, Coating, Extreme ultraviolet, EUV optics, Plasma, Liquids, Tin

PROCEEDINGS ARTICLE | June 3, 2005
Proc. SPIE. 5826, Opto-Ireland 2005: Optical Sensing and Spectroscopy
KEYWORDS: Lithography, Spectrographs, Ceramics, Ions, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Spectrographs, Calibration, Chemical species, Electrons, Ions, Plasmas, Nd:YAG lasers, Extreme ultraviolet, Grazing incidence, Tin

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