Paul Turner
at Veeco Instruments Inc
SPIE Involvement:
Publications (4)

Proceedings Article | 12 October 2021 Presentation + Paper
Katrina Rook, Antonio Checco, Paul Turner, Ashish Kulkarni, Kenji Yamamoto, Meng Lee
Proceedings Volume 11854, 1185415 (2021)
KEYWORDS: Reflectivity, Multilayers, Molybdenum, Silicon, Extreme ultraviolet, Sputter deposition, Ion beams, Ions, Contamination, Argon

SPIE Journal Paper | 17 June 2021
Katrina Rook, Paul Turner, Narasimhan Srinivasan, Kenji Yamamoto, Tania Henry, Meng Lee
JM3, Vol. 20, Issue 02, 021008, (June 2021)
KEYWORDS: Reflectivity, Transmission electron microscopy, Molybdenum, Silicon, Extreme ultraviolet, Ion beams, Interfaces, Multilayers, Chemical species, Ions

Proceedings Article | 15 October 2020 Presentation + Paper
Katrina Rook, Paul Turner, Narasimhan Srinivasan, Tania Henry, Kenji Yamamoto, Meng Lee
Proceedings Volume 11517, 1151708 (2020)
KEYWORDS: Extreme ultraviolet, Multilayers, Reflectivity, Molybdenum, Silicon, Mirrors, Ion beams, X-rays, Spectroscopy, Transmission electron microscopy

Proceedings Article | 26 September 2019 Paper
Narasimhan Srinivasan, Katrina Rook, Paul Turner, Tania Henry, Kenji Yamamoto, Devlin Donnelly, Thu Van Nguyen, Vincent Ip, Meng Lee, Sandeep Kohli, Frank Cerio, Adrian Devahasayam
Proceedings Volume 11147, 111470N (2019)
KEYWORDS: Silicon, Molybdenum, Multilayers, Extreme ultraviolet, Atomic force microscopy, Photomasks, Surface roughness, Ion beams, Reflectivity, Interfaces

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