Paul P. Yu
Sr. Product Marketing Manager at KLA Corp
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 17 October 2008 Paper
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Reticles, Air contamination, Metals, Image processing, Inspection, Data processing, Microelectronics, Wafer inspection, Photomasks, Semiconducting wafers

Proceedings Article | 17 October 2008 Paper
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Reticles, Contamination, Stars, Defect detection, Sensors, Inspection, Photomasks, SRAF, Algorithm development, Semiconducting wafers

Proceedings Article | 2 May 2008 Paper
Proc. SPIE. 6792, 24th European Mask and Lithography Conference
KEYWORDS: Reticles, Logic, Defect detection, Data modeling, Databases, Inspection, 3D modeling, Image transmission, Optical proximity correction, SRAF

Proceedings Article | 30 October 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Lithography, Reticles, Deep ultraviolet, Cameras, Etching, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Fiber optic illuminators

Proceedings Article | 25 October 2007 Paper
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Reticles, Logic, Defect detection, Data modeling, Databases, Inspection, 3D modeling, Image transmission, Optical proximity correction, SRAF

Showing 5 of 10 publications
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