Presented here is the world’s first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.
Miniaturized RGB-laser light sources could become an enabler for fashionable augmented and mixed reality glasses. Increased assembly productivity for these micro opto-electrical RGB-light sources and a further reduction in their package dimensions are mandatory. We present our new approach to build miniature RGB-light sources on structured silicon wafers. These are part of our optical packaging platform that enables efficient assemblies with controlled working environments for long term performance of semiconductor laser sources. The platform provides an optical bench with integrated heat spreader and emission windows enabling miniature hermet ic housing for laser diodes assemblies on 8” wafers or chip level.