Dr. Pavel V. Bulkin
at Ecole Polytechnique
SPIE Involvement:
Publications (13)

Proceedings Article | 23 November 2015 Paper
Proc. SPIE. 9632, Laser-Induced Damage in Optical Materials: 2015
KEYWORDS: Multilayers, Polishing, Silica, Sputter deposition, Laser induced damage, Manufacturing, Optical coatings, Ion beams, Laser damage threshold, Optics manufacturing

Proceedings Article | 5 April 2007 Paper
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Diffraction, Holograms, Metrology, Spectroscopy, Nickel, Polarimetry, Atomic force microscopy, Solids, Electroplating, Diffraction gratings

Proceedings Article | 5 October 2005 Paper
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Gradient-index optics, Ellipsometry, Antireflective coatings, Glasses, Spectroscopy, Silicon, Process control, Antennas, Microwave radiation, Plasma

Proceedings Article | 3 April 2003 Paper
Proc. SPIE. 4944, Integrated Optical Devices: Fabrication and Testing
KEYWORDS: Ellipsometry, Refractive index, Silica, Silicon, Hydrogen, Oxygen, Antennas, Microwave radiation, Plasma, Absorption

SPIE Journal Paper | 1 April 1997
OE Vol. 36 Issue 04
KEYWORDS: Optical coatings, Refractive index, Optical filters, Reflectivity, Filtering (signal processing), Manufacturing, Optical fibers, Absorption, Apodization, Plasma enhanced chemical vapor deposition

Showing 5 of 13 publications
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