Prof. Paweł Janus
at Instytut Technologii Elektronowej
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | November 10, 2016
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Silica, Sensors, Etching, Dielectrics, Silicon, Manufacturing, Atomic force microscopy, Finite element methods, Deep reactive ion etching, Optics manufacturing

PROCEEDINGS ARTICLE | November 10, 2016
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Gold, Sensors, Calibration, Electrodes, Metals, Silicon, Platinum, Profilometers, Deposition processes, Velocity measurements

PROCEEDINGS ARTICLE | November 10, 2016
Proc. SPIE. 10161, 14th International Conference on Optical and Electronic Sensors
KEYWORDS: Signal to noise ratio, Laser sources, Electronics, Sensors, Calibration, Data acquisition, Head, Microopto electromechanical systems, Micromirrors, System integration

PROCEEDINGS ARTICLE | September 16, 2014
Proc. SPIE. 9236, Scanning Microscopies 2014
KEYWORDS: Actuators, Optical fibers, Metrology, Sensors, Calibration, Microscopy, Silicon, Atomic force microscopy, Standards development, Wheatstone bridges

PROCEEDINGS ARTICLE | September 16, 2014
Proc. SPIE. 9236, Scanning Microscopies 2014
KEYWORDS: Electronics, Optical lithography, Sensors, Microscopy, Silicon, Amplifiers, Platinum, Bridges, Semiconducting wafers, Wheatstone bridges

PROCEEDINGS ARTICLE | July 25, 2013
Proc. SPIE. 8902, Electron Technology Conference 2013
KEYWORDS: Nanostructures, Biosensing, Silicon, Reliability, Atomic force microscopy, Scanning electron microscopy, Sensing systems, Field effect transistors, Nanolithography, Nanowires

Showing 5 of 11 publications
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