Dr. Pawitter J. Mangat
Director -Global Supplier Quality at Globalfoundries Inc
SPIE Involvement:
Author
Publications (58)

Proceedings Article | 16 October 2017 Presentation + Paper
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Lithography, Microscopes, Optical lithography, Image segmentation, Reflectivity, Image analysis, 3D metrology, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Carbon, Reticles, Optical lithography, Contamination, Air contamination, Ions, Reflectivity, Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Atmospheric particles, Ruthenium

Proceedings Article | 24 March 2017 Presentation + Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Inspection, Chromium, Atomic force microscopy, Scanning electron microscopy, Printing, Bridges, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

SPIE Journal Paper | 28 June 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Zernike polynomials, Extreme ultraviolet lithography, Extreme ultraviolet, Monochromatic aberrations, Imaging systems, Photomasks, Wavefronts, Metrology, Microscopes, Statistical analysis

Proceedings Article | 18 March 2016 Paper
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Semiconductors, Lithography, Monochromatic aberrations, Metrology, Principal component analysis, Detection and tracking algorithms, Data modeling, Image processing, Interferometry, Computer simulations, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Systems modeling

Showing 5 of 58 publications
Conference Committee Involvement (10)
Extreme Ultraviolet (EUV) Lithography VII
22 February 2016 | San Jose, California, United States
Photomask Technology 2015
29 September 2015 | Monterey, California, United States
Extreme Ultraviolet (EUV) Lithography VI
23 February 2015 | San Jose, California, United States
Photomask Technology 2014
16 September 2014 | Monterey, California, United States
SPIE Photomask Technology
10 September 2013 | Monterey, California, United States
Showing 5 of 10 Conference Committees
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