Pei-Ren Jeng
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Copper, Inspection, Wafer inspection, Photomasks, Semiconductor manufacturing, Optical proximity correction, Semiconducting wafers, Library classification systems, Back end of line, Defect inspection

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