Mr. Pei Pei Wei
at
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Publications (1)

PROCEEDINGS ARTICLE | March 6, 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Diffraction, Metrology, Sensors, Reflectivity, Interferometry, Wavefronts, Transducers, Profiling, Signal detection, Diffraction gratings

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