Peiran Gao
at Univ of California Berkeley
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Wafer-level optics, Logic, Optical lithography, Image processing, Neural networks, Photomasks, Optical proximity correction, Semiconducting wafers, Optics manufacturing, Performance modeling

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