Peiwen Chen
at Zhejiang Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 December 2018
Proc. SPIE. 10848, Micro-Optics and MOEMS
KEYWORDS: Mirrors, Optical design, Sensors, Interferometry, Optical resonators, Microopto electromechanical systems, Modal analysis, Mechanical sensors, Structural sensing, Diffraction gratings

Proceedings Article | 5 November 2018
Proc. SPIE. 10815, Optical Design and Testing VIII
KEYWORDS: Microelectromechanical systems, Packaging, Sensors, Silicon, Interferometry, Thermal effects, Microopto electromechanical systems, Finite element methods, Adhesives, Thermal modeling

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