Pejman Monajemi
at Georgia Institute of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Capacitors, Sensors, Etching, Electrodes, Silicon, Deep reactive ion etching, High aspect ratio silicon micromachining

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