Dr. Peng Bu
Staff System Design Engineer at Carl Zeiss (Shanghai) Co., Ltd.
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | March 13, 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Lithography, Polarization, Birefringence, Matrices, Polarizers, Wave plates, Photomasks, Critical dimension metrology, Resolution enhancement technologies, Received signal strength

PROCEEDINGS ARTICLE | October 5, 2011
Proc. SPIE. 8171, Physical Optics
KEYWORDS: Diffraction, Mirrors, Scattering, Calibration, Error analysis, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Systems modeling

SPIE Journal Paper | May 1, 2008
OE Vol. 47 Issue 05
KEYWORDS: CCD cameras, Mirrors, Optical coherence tomography, Wavefronts, Glasses, Fourier transforms, Spatial frequencies, Imaging systems, Image resolution, Range imaging

PROCEEDINGS ARTICLE | January 17, 2008
Proc. SPIE. 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Light sources, Ferroelectric materials, Phase modulation, Modulation, Interferometers, Phase shift keying, Computer simulations, Semiconductor lasers, Signal processing, Signal detection

PROCEEDINGS ARTICLE | January 8, 2008
Proc. SPIE. 6826, Optics in Health Care and Biomedical Optics III
KEYWORDS: Mirrors, Biomedical optics, Phase modulation, Optical coherence tomography, Skin, Interfaces, Fourier transforms, Interferometry, Phase interferometry, CCD cameras

SPIE Journal Paper | October 1, 2007
OE Vol. 46 Issue 10
KEYWORDS: Optical coherence tomography, Interferometry, Interfaces, Phase interferometry, CCD cameras, Glasses, Imaging systems, Phase shifts, Mirrors, Phase shift keying

Showing 5 of 6 publications
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