Dr. Peng Bu
Staff Scientist at Optovue Inc
SPIE Involvement:
Publications (6)

Proceedings Article | 13 March 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Polarization, Lithography, Photomasks, Matrices, Resolution enhancement technologies, Birefringence, Critical dimension metrology, Wave plates, Polarizers, Received signal strength

Proceedings Article | 5 October 2011
Proc. SPIE. 8171, Physical Optics
KEYWORDS: Photomasks, Diffraction, Mirrors, Extreme ultraviolet, Reflectivity, Systems modeling, Extreme ultraviolet lithography, Error analysis, Scattering, Calibration

SPIE Journal Paper | 1 May 2008
OE Vol. 47 Issue 05
KEYWORDS: CCD cameras, Mirrors, Optical coherence tomography, Wavefronts, Glasses, Fourier transforms, Spatial frequencies, Imaging systems, Image resolution, Range imaging

Proceedings Article | 17 January 2008
Proc. SPIE. 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Modulation, Interferometers, Semiconductor lasers, Phase shift keying, Phase modulation, Signal detection, Computer simulations, Signal processing, Ferroelectric materials, Light sources

Proceedings Article | 8 January 2008
Proc. SPIE. 6826, Optics in Health Care and Biomedical Optics III
KEYWORDS: CCD cameras, Interferometry, Skin, Optical coherence tomography, Fourier transforms, Phase interferometry, Phase modulation, Interfaces, Mirrors, Biomedical optics

Showing 5 of 6 publications
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