Dr. Peng Jin
at
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | October 1, 2004
JM3 Vol. 3 Issue 04
KEYWORDS: Ultraviolet radiation, Photoresist materials, Lithography, Image processing, Absorption, Carbon monoxide, Scanning electron microscopy, Transparency, Sun, Photoresist developing

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Microelectromechanical systems, Actuators, Lithography, Transparency, Ultraviolet radiation, Combustion, Photoresist materials, Microfabrication, Carbon monoxide, Absorption

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top