Dr. Peng Su
Assistant Research Professor, Optical Science at ASML US Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (38)

Proceedings Article | 14 September 2018 Presentation + Paper
Proc. SPIE. 10742, Optical Manufacturing and Testing XII
KEYWORDS: Monochromatic aberrations, Metrology, Data modeling, Cameras, Interferometry, Computer generated holography, Deflectometry, Ray tracing, Freeform optics, Systems modeling

Proceedings Article | 22 July 2016 Paper
Proc. SPIE. 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II
KEYWORDS: Mirrors, Mirrors, Solar telescopes, Solar telescopes, Metrology, Interferometry, Optical fabrication, Computer generated holography, Bidirectional reflectance transmission function, Aspheric lenses, Off axis mirrors, Surface finishing

Proceedings Article | 16 November 2015 Paper
Proc. SPIE. 9575, Optical Manufacturing and Testing XI
KEYWORDS: Mirrors, Scattering, Cameras, Sensors, Error analysis, Computer simulations, Image analysis, Zernike polynomials, Ray tracing, Device simulation

Proceedings Article | 27 August 2015 Paper
Proc. SPIE. 9575, Optical Manufacturing and Testing XI
KEYWORDS: Mirrors, Metrology, Imaging systems, Cameras, Calibration, Lens design, Optical testing, Deflectometry, LCDs, Aspheric lenses

SPIE Journal Paper | 5 August 2015
OE Vol. 54 Issue 08
KEYWORDS: Mirrors, Calibration, Cameras, X-ray optics, X-rays, Optical testing, Metrology, Distortion, Aspheric lenses, Monochromatic aberrations

Showing 5 of 38 publications
Conference Committee Involvement (11)
Optical System Alignment, Tolerancing, and Verification XIV
1 August 2021 | San Diego, California, United States
Optical System Alignment, Tolerancing, and Verification XIII
24 August 2020 | Online Only, California, United States
Optical Modeling and System Alignment
12 August 2019 | San Diego, California, United States
Optical System Alignment, Tolerancing, and Verification XII
19 August 2018 | San Diego, California, United States
Optical System Alignment, Tolerancing, and Verification XI
6 August 2017 | San Diego, California, United States
Showing 5 of 11 Conference Committees
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top