Peng Tang
at Univ of Oklahoma
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Electron beam lithography, Metrology, Deep ultraviolet, Inspection, Scanning electron microscopy, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Stochastic processes

Proceedings Article | 15 April 2011
Proc. SPIE. 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011
KEYWORDS: Packaging, Roads, Sensors, Numerical simulations, Civil engineering, Bridges, Antennas, Wireless communications, Electromagnetism, Absorption

Proceedings Article | 15 November 2007
Proc. SPIE. 6786, MIPPR 2007: Automatic Target Recognition and Image Analysis; and Multispectral Image Acquisition
KEYWORDS: Statistical analysis, Detection and tracking algorithms, Video, Particles, Video surveillance, Monte Carlo methods, Optical flow, Motion models, Stochastic processes, Expectation maximization algorithms

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