Peng Xu
Advisory Engineer/Scientist at IBM Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 1, 2011
Proc. SPIE. 8107, Nano-Opto-Mechanical Systems (NOMS)
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Optical lithography, Nano opto mechanical systems, Graphene, Silicon, Micromirrors, Carbon nanotubes, Nanowires

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