Dr. Peng Xu
at Xiamen Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 1 May 2008
Proc. SPIE. 6940, Infrared Technology and Applications XXXIV
KEYWORDS: Microelectromechanical systems, Thermography, Infrared imaging, Modulation, Silica, Silicon, Infrared radiation, Deep reactive ion etching, Semiconducting wafers, Temperature metrology

Proceedings Article | 30 April 2008
Proc. SPIE. 6959, Micro (MEMS) and Nanotechnologies for Space, Defense, and Security II
KEYWORDS: Gold, Electron beam lithography, Switches, Iron, Ferromagnetics, Resistance, Magnetism, Electronic components, Electron transport, Temperature metrology

Proceedings Article | 4 January 2008
Proc. SPIE. 6836, MEMS/MOEMS Technologies and Applications III
KEYWORDS: Microelectromechanical systems, Switches, Capacitors, Metals, Dielectrics, Silicon, Reliability, Capacitance, Bridges, Aluminum

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