Petcharin Pornnoppadol
at PTB
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microsystems, Silicon, Resistance, Doping, 3D metrology, Bridges, Integrated circuits, Resistors, Temperature metrology, Wheatstone bridges

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