Dr. Peter B. Bjoernangen
R&D Engineer at Mycronic AB
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Mirrors, Modulation, Silica, Imaging systems, Electrodes, Copper, Laser processing, Laser applications, Semiconductor lasers, Spatial light modulators

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Actuators, Mirrors, Optical lithography, Deep ultraviolet, Electrodes, Dielectrics, Spatial light modulators, Micromirrors, Aluminum, Laser systems engineering

PROCEEDINGS ARTICLE | October 30, 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Microelectromechanical systems, Diffraction, Mirrors, Optical lithography, Deep ultraviolet, Reflectivity, Surface roughness, Microopto electromechanical systems, Micromirrors, Photomasks

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Optical components, Contamination, Deep ultraviolet, Molecules, Spatial light modulators, Photomasks, Chemical analysis, Molecular lasers, Climatology, Contamination control

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Diffraction, Refractive index, Diffractive optical elements, Quartz, Manufacturing, Phase shift keying, Spatial light modulators, Photomasks, Stray light, Optics manufacturing

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