Peter Buck
Director Marketing-Calibre MPC & Fab Solutions at Mentor - a Siemens Business
SPIE Involvement:
Conference Program Committee | Track Chair | Author | Editor
Area of Expertise:
Photomasks , OPC , Lithography Simulation
Websites:
Publications (76)

Proceedings Article | 16 October 2019
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Lithography, Data modeling, Opacity, Calibration, Etching, Manufacturing, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 3 October 2019
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Lithography, Data modeling, Waveguides, Data processing, Neural networks, Photomasks, Machine learning, Computational lithography, Optical proximity correction, Vestigial sideband modulation

Proceedings Article | 26 September 2019
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Scattering, Calibration, Etching, Control systems, Photomasks, Semiconductor manufacturing, Critical dimension metrology, Photoresist processing, Model-based design, Process modeling

Proceedings Article | 29 August 2019
Proc. SPIE. 11177, 35th European Mask and Lithography Conference (EMLC 2019)
KEYWORDS: Electron beam lithography, Photomasks, Mask making

Proceedings Article | 12 November 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Lithography, Cadmium, Data modeling, Calibration, Etching, Scanning electron microscopy, Photomasks, Double patterning technology, SRAF, Vestigial sideband modulation

Showing 5 of 76 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 5 December 2017

SPIE Conference Volume | 8 December 2016

Conference Committee Involvement (14)
Photomask Technology
20 September 2020 | Monterey, California, United States
Photomask Technology
16 September 2019 | Monterey, California, United States
Photomask Technology
17 September 2018 | Monterey, California, United States
Photomask Technology
11 September 2017 | Monterey, California, United States
Photomask Technology
12 September 2016 | San Jose, California, United States
Showing 5 of 14 Conference Committees
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