Dr. Peter Dirksen
at Philips Research Labs
SPIE Involvement:
Conference Program Committee | Author
Publications (19)

SPIE Journal Paper | 1 July 2006
JM3 Vol. 5 Issue 03
KEYWORDS: Lithography, Scanners, Image processing, Zernike polynomials, Monochromatic aberrations, Solids, Optical lithography, Lithographic illumination, Computer simulations

Proceedings Article | 15 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Reticles, Wavefronts, Spherical lenses, Monochromatic aberrations, Semiconducting wafers, Metrology, Interferometers, Mirrors, Objectives, Phase measurement

SPIE Journal Paper | 1 January 2006
JM3 Vol. 5 Issue 01
KEYWORDS: Diffusion, Optical lithography, Mathematical modeling, Monochromatic aberrations, Point spread functions, Image processing, Convolution, Stochastic processes, Photoresist processing, Solids

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Diffraction, Photomasks, Polarization, Chromium, Binary data, Semiconducting wafers, Critical dimension metrology, Reticles, Optical proximity correction, Near field

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Point spread functions, Diffusion, Scanners, Monochromatic aberrations, Solids, Diffraction, Lithography, Semiconducting wafers, Water, Mathematical modeling

Proceedings Article | 5 May 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Photomasks, Critical dimension metrology, Manufacturing, Semiconducting wafers, Design for manufacturing, Image processing, Electroluminescence, Lithography, Data modeling, Scanners

Showing 5 of 19 publications
Conference Committee Involvement (4)
Optical Microlithography XIX
21 February 2006 | San Jose, California, United States
Optical Microlithography XVIII
1 March 2005 | San Jose, California, United States
Optical Microlithography XVII
24 February 2004 | Santa Clara, California, United States
Optical Microlithography XVI
25 February 2003 | Santa Clara, California, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top