Dr. Peter Dress
Senior Technologist at SUSS MicroTec Solutions GmbH & Co KG
SPIE Involvement:
Publications (45)

Proceedings Article | 4 October 2016 Paper
Jyh-Wei Hsu, Martin Samayoa, Peter Dress, Uwe Dietze, Ai-Jay Ma, Chia-Shih Lin, Rick Lai, Peter Chang, Laurent Tuo
Proceedings Volume 9985, 998515 (2016) https://doi.org/10.1117/12.2241143
KEYWORDS: SRAF, Photomasks, Cavitation, Particles, Inspection, Glasses, Plasma, Mask cleaning, Acoustics, Oxygen

Proceedings Article | 28 June 2013 Paper
Hrishi Shende, Sherjang Singh, James Baugh, Uwe Dietze, Peter Dress
Proceedings Volume 8701, 870105 (2013) https://doi.org/10.1117/12.2029883
KEYWORDS: Argon, Acoustics, Cavitation, Photomasks, SRAF, Stereolithography, Liquids, Energy transfer, Particles, Gases

Proceedings Article | 28 June 2013 Paper
Proceedings Volume 8701, 870104 (2013) https://doi.org/10.1117/12.2027974
KEYWORDS: Chemistry, Cavitation, Acoustics, Particles, SRAF, Ions, Photomasks, Liquids, Mask cleaning, Thermodynamics

Proceedings Article | 1 April 2013 Paper
Proceedings Volume 8679, 86791E (2013) https://doi.org/10.1117/12.2012265
KEYWORDS: Ruthenium, Cavitation, Acoustics, Chemistry, Reticles, Extreme ultraviolet, Particles, Critical dimension metrology, Photomasks, Extreme ultraviolet lithography

Proceedings Article | 8 November 2012 Paper
Proceedings Volume 8522, 85221P (2012) https://doi.org/10.1117/12.964960
KEYWORDS: Particles, Liquids, Photomasks, Velocity measurements, Silicon, SRAF, Wavelets, Personal digital assistants, Tin, Mask cleaning

Showing 5 of 45 publications
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