Dr. Peter Dürr
senior scientist at Fraunhofer-Institut fuer Photonische Mikrosysteme
SPIE Involvement:
Author
Area of Expertise:
micro optics , spatial light modulators
Websites:
Publications (17)

Proceedings Article | 4 March 2019
Proc. SPIE. 10931, MOEMS and Miniaturized Systems XVIII
KEYWORDS: Microelectromechanical systems, Actuators, Diffractive optical elements, Modulation, Electrodes, Computer generated holography, Spatial light modulators, Finite element methods, Micromirrors

Proceedings Article | 7 March 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Mirrors, Modulation, Silica, Imaging systems, Electrodes, Copper, Laser processing, Laser applications, Semiconductor lasers, Spatial light modulators

Proceedings Article | 5 February 2010
Proc. SPIE. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
KEYWORDS: Mirrors, Microsystems, Calibration, Resistance, Microopto electromechanical systems, Micromirrors, Convection, Resistors, Temperature metrology, Photonic microstructures

Proceedings Article | 19 February 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Actuators, Mirrors, Optical lithography, Deep ultraviolet, Electrodes, Dielectrics, Spatial light modulators, Micromirrors, Aluminum, Laser systems engineering

SPIE Journal Paper | 1 April 2008
JM3 Vol. 7 Issue 02
KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Deep ultraviolet, Oxides, Actuators, Analog electronics, Titanium, Silicon

Proceedings Article | 30 October 2007
Proc. SPIE. 6730, Photomask Technology 2007
KEYWORDS: Microelectromechanical systems, Diffraction, Mirrors, Optical lithography, Deep ultraviolet, Reflectivity, Surface roughness, Microopto electromechanical systems, Micromirrors, Photomasks

Showing 5 of 17 publications
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