Dr. Peter J. Evans
at ANSTO
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 30 December 2008
Proc. SPIE. 7267, Smart Materials V
KEYWORDS: Atomic layer deposition, Silica, Scanning electron microscopy, Molecules, Chemistry, Coating, Ions, Biosensing, Self-assembled monolayers, Silicon

Proceedings Article | 10 September 2008
Proc. SPIE. 7041, Nanostructured Thin Films
KEYWORDS: Atomic layer deposition, Optical coatings, Multilayers, Transmission electron microscopy, Silicon, Crystals, Reflectivity, Optical properties, Antireflective coatings, Titanium dioxide

Proceedings Article | 4 January 2006
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Superconductors, Crystals, Copper, Barium, Samarium, Europium, Transmission electron microscopy, Scanning tunneling microscopy, Modulation, Liquids

Proceedings Article | 20 August 2005
Proc. SPIE. 5870, Advances in Thin-Film Coatings for Optical Applications II
KEYWORDS: Atomic layer deposition, Aluminum, Silicon, Transmission electron microscopy, Silicon films, Refractive index, Glasses, Interfaces, X-rays, Dielectrics

Proceedings Article | 2 April 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Aluminum, Atomic layer deposition, Silicon, Thin films, Microelectromechanical systems, Metals, Multilayers, Oxides, Ions, Chlorine

Showing 5 of 8 publications
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