Dr. Peter C. Figliozzi Profile

Dr. Peter C. Figliozzi

at SEMATECH Inc

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Author

Publications (2)

Proceedings Article | 24 March 2006 Paper

Defect metrology challenges at 45-nm technology node and beyond

Dilip Patel, Jeffrey Hanrahan, Kyuhong Lim, Milton Godwin, Peter Figliozzi, Dale Sheu

Proceedings Volume 6152, 615207 (2006) https://doi.org/10.1117/12.664190

KEYWORDS: Defect detection, Semiconducting wafers, Inspection, Scanning electron microscopy, Target recognition, Metrology, Manufacturing, Wafer inspection, Particles, Chemical analysis

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Proceedings Article | 4 December 2003 Paper

Optical second-harmonic generation from silicon nanocrystals

Michael Downer, Peter Figliozzi, Yingying Jiang, Liangfeng Sun, Brian Mattern, C. White, Steve Withrow

Proceedings Volume 5223, (2003) https://doi.org/10.1117/12.511483

KEYWORDS: Second-harmonic generation, Signal detection, Polarization, Interfaces, Glasses, Nanocrystals, Silicon, Nanoparticles, Spectroscopy, Signal generators

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