Dr. Peter C. Figliozzi
at SEMATECH Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Metrology, Defect detection, Particles, Manufacturing, Inspection, Scanning electron microscopy, Wafer inspection, Chemical analysis, Target recognition, Semiconducting wafers

PROCEEDINGS ARTICLE | December 4, 2003
Proc. SPIE. 5223, Physical Chemistry of Interfaces and Nanomaterials II
KEYWORDS: Second-harmonic generation, Polarization, Nanoparticles, Glasses, Spectroscopy, Interfaces, Silicon, Signal generators, Nanocrystals, Signal detection

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