Dr. Peter He Profile

Dr. Peter He

at Tuskegee Univ

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Publications (1)

Proceedings Article | 10 March 2006

Multivariate visualization techniques in statistical process monitoring and their applications to semiconductor manufacturing

Q. Peter He

Proc. SPIE. 6155, Data Analysis and Modeling for Process Control III

KEYWORDS: Semiconductors, Principal component analysis, Visual analytics, Data modeling, Visualization, Data processing, Process control, Semiconductor manufacturing, Chemometrics, Dynamical systems

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