Dr. Peter He Profile

Dr. Peter He

at Tuskegee Univ

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Publications (1)

Proceedings Article | 10 March 2006 Paper

Multivariate visualization techniques in statistical process monitoring and their applications to semiconductor manufacturing

Q. Peter He

Proc. SPIE. 6155, Data Analysis and Modeling for Process Control III

KEYWORDS: Semiconductors, Principal component analysis, Visual analytics, Data modeling, Visualization, Data processing, Process control, Semiconductor manufacturing, Chemometrics, Dynamical systems

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