Peter Heiland
President at Integrated Dynamics Engineering Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (1)

PROCEEDINGS ARTICLE | August 29, 2005
Proc. SPIE. 5933, Buildings for Nanoscale Research and Beyond
KEYWORDS: Semiconductors, Nanotechnology, Sensors, Scanning probe lithography, Buildings, Scanning probe microscopy, Motion models, Acoustics, Environmental sensing, Virtual colonoscopy

Conference Committee Involvement (1)
Current Developments in Vibration Control for Optomechanical Systems
20 July 1999 | Denver, CO, United States
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