Peter Huang
Deputy Director at United Microelectronics Corp
SPIE Involvement:
Publications (5)

Proceedings Article | 4 March 2010 Paper
Wei Cyuan Lo, Yung Feng Cheng, Ming Jui Chen, Peter Haung, Stephen Chang, Eiji Tsujimoto
Proceedings Volume 7640, 76402S (2010)
KEYWORDS: Photomasks, Semiconducting wafers, Instrument modeling, Printing, Data modeling, Optical proximity correction, Optical lithography, Bridges, Microelectronics, Manufacturing

Proceedings Article | 17 October 2008 Paper
Proceedings Volume 7122, 71223J (2008)
KEYWORDS: Inspection, Photomasks, Reticles, Semiconducting wafers, Air contamination, Wafer inspection, Metals, Microelectronics, Data processing, Image processing

Proceedings Article | 8 November 2005 Paper
Yung Feng Cheng, Yueh Lin Chou, C. Lin, Peter Huang
Proceedings Volume 5992, 59922R (2005)
KEYWORDS: Photomasks, Semiconducting wafers, 3D metrology, 3D printing, Printing, 193nm lithography, Lithography, Wafer manufacturing, Atomic force microscopy

Proceedings Article | 27 December 2002 Paper
William Chou, Tsung Chen, Will Tseng, Peter Huang, Chin Tseng, Mars Chung, Dick Wang, Norman Huang
Proceedings Volume 4889, (2002)
KEYWORDS: Photomasks, Semiconducting wafers, Quartz, Reticles, Inspection, Lithography, Critical dimension metrology, Image processing, Phase shifting, Scanning electron microscopy

Proceedings Article | 5 July 2000 Paper
Kuei-Chun Hung, Benjamin Lin, Hsien-an Chang, Alex Tseng, Lien-Sheng Chung, WeiJyh Liu, Der-Yuan Wu, Peter Huang
Proceedings Volume 4000, (2000)
KEYWORDS: Distortion, Printing, Optical lithography, Photomasks, Scattering, Etching, Phase shifts, Critical dimension metrology, Photoresist materials, Scanning electron microscopy

Conference Committee Involvement (3)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
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