Dr. Peter Ivanov
Researcher at Institute of Microelectronics of Barcelona IMB-CNM
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 December 2008
Proc. SPIE. 7268, Smart Structures, Devices, and Systems IV
KEYWORDS: Fabrication, Gas sensors, Optical lithography, Sensors, Silicon, Aluminum, Deep reactive ion etching, Palladium, Semiconducting wafers, Wafer bonding

Proceedings Article | 17 May 2007
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Gas sensors, Sensors, Glasses, Silicon, Gases, Chromium, Deep reactive ion etching, Palladium, System integration, Semiconducting wafers

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