Peter Johnsen
at JILA
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Nanoimaging, Extreme ultraviolet

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Stereoscopy, Reflectometry, Extreme ultraviolet, 3D image processing

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Wafer-level optics, Coherence imaging, Metrology, Imaging systems, Reflectivity, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Coherence imaging, Cameras, Stereoscopy, Silicon, Reflectivity, Reflectometry, Profiling, 3D metrology, Extreme ultraviolet, 3D image processing

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