Dr. Peter Reinig
Head of Group Sensor Systems at Fraunhofer-Institut für Photonische Mikrosysteme
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Author
Publications (7)

PROCEEDINGS ARTICLE | February 22, 2018
Proc. SPIE. 10545, MOEMS and Miniaturized Systems XVII
KEYWORDS: Microelectromechanical systems, Mirrors, Cell phones, Cameras, Sensors, Spectrometers, Reflectivity, Optical fabrication, Spherical lenses, Assembly equipment

PROCEEDINGS ARTICLE | February 22, 2018
Proc. SPIE. 10545, MOEMS and Miniaturized Systems XVII
KEYWORDS: Microelectromechanical systems, Near infrared, Diffraction, Optical design, Cell phones, Sensors, Spectrometers, Spectral resolution, Digital Light Processing, Diffraction gratings

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10448, Optifab 2017
KEYWORDS: Chromatic aberrations, Mirrors, Cameras, Spectroscopy, Reflectivity, Photonics systems, 3D printing, Stereoscopic cameras, Spherical lenses, Optical mounts

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9700, Design and Quality for Biomedical Technologies IX
KEYWORDS: Microelectromechanical systems, Near infrared, Mirrors, Eye, Safety, Ophthalmology, Retina, Laser irradiation, Retinal scanning, Laser safety, Pulsed laser operation, Standards development

PROCEEDINGS ARTICLE | June 18, 2007
Proc. SPIE. 6617, Modeling Aspects in Optical Metrology
KEYWORDS: Ellipsometry, Diffraction, Polarization, Etching, Scanning electron microscopy, Scatterometry, Spectroscopic ellipsometry, Picosecond phenomena, Jones vectors, Systems modeling

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Metrology, 3D applications, Scattering, 3D modeling, Scanning electron microscopy, Scatterometry, 3D metrology, Process control, Semiconducting wafers, Scatter measurement

Showing 5 of 7 publications
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